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1

Fabricating capacitive micromachined ultrasonic transducers with wafer-bonding technology

Yongli Huang, Ergun, A.S., Haeggstrom, E., Badi, M.H., Khuri-Yakub, B.T.

Journal:

Journal of Microelectromechanical Systems

Year:

2003

Language:

english

File:

PDF, 1.32 MB

english, 2003

2

50 kHz capacitive micromachined ultrasonic transducers for generation of highly directional sound with parametric arrays

Wygant, I.O., Kupnik, M., Windsor, J.C., Wright, W.M., Wochner, M.S., Yaralioglu, G.G., Hamilton, M.F., Khuri-Yakub, B.T.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2009

Language:

english

File:

PDF, 831 KB

english, 2009

3

Theory and analysis of electrode size optimization for capacitive microfabricated ultrasonic transducers

Bozkurt, A., Ladabaum, I., Atalar, A., Khuri-Yakub, B.T.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

1999

Language:

english

File:

PDF, 288 KB

english, 1999

4

Characterization of one-dimensional capacitive micromachined ultrasonic immersion transducer arrays

Xuecheng Jin,, Oralkan, O., Degertekin, F.L., Khuri-Yakub, B.T.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2001

Language:

english

File:

PDF, 5.69 MB

english, 2001

5

The microfabrication of capacitive ultrasonic transducers

Xuecheng Jin,, Ladabaum, I., Khuri-Yakub, B.T.

Journal:

Journal of Microelectromechanical Systems

Year:

1998

Language:

english

File:

PDF, 207 KB

english, 1998

6

Encapsulation of Capacitive Micromachined Ultrasonic Transducers Using Viscoelastic Polymer

Lin, Der-Song, Zhuang, Xuefeng, Wong, Serena H., Kupnik, Mario, Khuri-Yakub, Butrus Thomas

Journal:

Journal of Microelectromechanical Systems

Year:

2010

Language:

english

File:

PDF, 745 KB

english, 2010

7

Surface micromachined capacitive ultrasonic transducers

Ladabaum, I., Xuecheng Jin, Soh, H.T., Atalar, A., Khuri-Yakub, B.t.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

1998

Language:

english

File:

PDF, 766 KB

english, 1998

8

Capacitive micromachined ultrasonic transducer design for high power transmission

Bayram, B., Oralkan, O., Ergun, A.S., Haeggstrom, E., Yaralioglu, G.G., Khuri-Yakub, B.T.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2005

Language:

english

File:

PDF, 1.84 MB

english, 2005

9

A surface micromachined electrostatic ultrasonic air transducer

Haller, M.I., Khuri-Yakub, B.T.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

1996

Language:

english

File:

PDF, 1.04 MB

english, 1996

10

An integrated circuit with transmit beamforming flip-chip bonded to a 2-D CMUT array for 3-D ultrasound imaging

Wygant, I., Jamal, N., Lee, H., Nikoozadeh, A., Oralkan, O., Karaman, M., Khuri-yakub, B.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2009

Language:

english

File:

PDF, 1.36 MB

english, 2009

11

Fabrication and characterization of surface micromachined capacitive ultrasonic immersion transducers

Xuecheng Jin,, Ladabaum, I., Degertekin, F.L., Calmes, S., Khuri-Yakub, B.T.

Journal:

Journal of Microelectromechanical Systems

Year:

1999

Language:

english

File:

PDF, 592 KB

english, 1999

12

Capacitive micromachined ultrasonic transducers: next-generation arrays for acoustic imaging?

Oralkan, O., Ergun, A.S., Johnson, J.A., Karaman, M., Demirci, U., Kaviani, K., Lee, T.H., Khuri-Yakub, B.T.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2002

Language:

english

File:

PDF, 3.14 MB

english, 2002

13

Simulation and experimental characterization of a 2-D capacitive micromachined ultrasonic transducer array element

Oralkan, O., Xuecheng Jin,, Degertekin, F.L., Khuri-Yakub, B.T.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

1999

Language:

english

File:

PDF, 147 KB

english, 1999

14

Ultrahigh Sensitivity Carbon Nanotube Agents for Photoacoustic Molecular Imaging in Living Mice

Zerda, Adam de la, Liu, Zhuang, Bodapati, Sunil, Teed, Robert, Vaithilingam, Srikant, Khuri-Yakub, Butrus T., Chen, Xiaoyuan, Dai, Hongjie, Gambhir, Sanjiv Sam

Journal:

Year:

2010

Language:

english

File:

PDF, 3.23 MB

english, 2010

15

Finite element analysis of underwater capacitor micromachined ultrasonic transducers

Roh, Y., Khuri-Yakub, B.T.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2002

Language:

english

File:

PDF, 664 KB

english, 2002

16

Finite-element analysis of capacitive micromachined ultrasonic transducers

Yaralioglu, G.G., Ergun, S.A., Khuri-Yakub, B.T.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2005

Language:

english

File:

PDF, 1.69 MB

english, 2005

17

Near field scanning acoustic microscope and method

Khuri-Yakub, Butrus T.

Journal:

The Journal of the Acoustical Society of America

Year:

1994

Language:

english

File:

PDF, 130 KB

english, 1994

18

A $k$ -Space Pseudospectral Method for Elastic Wave Propagation in Heterogeneous Anisotropic Media

Firouzi, Kamyar, Khuri-Yakub, Butrus T.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2017

Language:

english

File:

PDF, 1.27 MB

english, 2017

19

A new design and manufacturing process for embedded Lamb waves interdigital transducers based on piezopolymer film

Filippo Bellan, Andrea Bulletti, Lorenzo Capineri, Leonardo Masotti, Goksen G. Yaralioglu, F. Levent Degertekin, B.T. Khuri-Yakub, Francesco Guasti, Edgardo Rosi

Journal:

Sensors and Actuators A: Physical

Year:

2005

Language:

english

File:

PDF, 566 KB

english, 2005

20

Integration of trench-isolated through-wafer interconnects with 2d capacitive micromachined ultrasonic transducer arrays

Xuefeng Zhuang, Arif S. Ergun, Yongli Huang, Ira O. Wygant, Omer Oralkan, Butrus T. Khuri-Yakub

Journal:

Sensors and Actuators A: Physical

Year:

2007

Language:

english

File:

PDF, 1.73 MB

english, 2007

21

Acoustic Surface Wave Measurements of Surface Cracks in Ceramics

B. T. KHURI-YAKUB, G. S. KINO, A. G. EVANS

Journal:

Journal of the American Ceramic Society

Year:

1980

Language:

english

File:

PDF, 1.46 MB

english, 1980

22

Lamb wave excitation by Hertzian contacts with applications in NDE

Degertakin, F.L., Khuri-Yakub, B.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

1997

Language:

english

File:

PDF, 1.25 MB

english, 1997

23

Surface acoustic wave measurements of surface cracks in ceramics

J. J. W. Tien, B. T. Khuri-Yakub, G. S. Kino, D. B. Marshall, A. G. Evans

Journal:

Journal of Nondestructive Evaluation

Year:

1981

Language:

english

File:

PDF, 1.20 MB

english, 1981

24

Defect characterization in the short-wavelength regime

C. H. Chou, B. T. Khuri-Yakub, G. S. Kino, A. G. Evans

Journal:

Journal of Nondestructive Evaluation

Year:

1980

Language:

english

File:

PDF, 1.59 MB

english, 1980

25

Minimally Redundant 2-D Array Designs for 3-D Medical Ultrasound Imaging

Karaman, M., Wygant, I.O., Oralkan, O., Khuri-Yakub, B.T.

Journal:

IEEE Transactions on Medical Imaging

Year:

2009

Language:

english

File:

PDF, 3.35 MB

english, 2009

26

Coherent-array imaging using phased subarrays. Part I: basic principles

Johnson, J.A., Karaman, M., Khuri-Yakub, B.T.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2005

Language:

english

File:

PDF, 2.93 MB

english, 2005

27

Volumetric real-time imaging using a CMUT ring array

Choe, J.W., Oralkan, O., Nikoozadeh, A., Gencel, M., Stephens, D.N., O'Donnell, M., Sahn, D.J., Khuri-Yakub, B.T.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2012

Language:

english

File:

PDF, 1.18 MB

english, 2012

28

Capacitive micromachined ultrasonic Lamb wave transducers using rectangular membranes

Badi, M.H., Yaralioglu, G.G., Ergun, A.S., Hansen, S.T., Wong, E.J., Khuri-Yakub, B.T.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2003

Language:

english

File:

PDF, 763 KB

english, 2003

29

Capacitive micromachined ultrasonic transducers for medical imaging and therapy

Khuri-Yakub, Butrus T, Oralkan, Ömer

Journal:

Journal of Micromechanics and Microengineering

Year:

2011

Language:

english

File:

PDF, 1.28 MB

english, 2011

30

Integration of 2D CMUT arrays with front-end electronics for volumetric ultrasound imaging

Wygant, I.O., Xuefeng Zhuang,, Yeh, D.T., Oralkan, O., Ergun, A.S., Karaman, M., Khuri-Yakub, B.T.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2008

Language:

english

File:

PDF, 2.62 MB

english, 2008

31

Calculation and measurement of electromechanical coupling coefficient of capacitive micromachined ultrasonic transducers

Yaralioglu, G.G., Ergun, A.S., Bayram, B., Haeggstrom, E., Khuri-Yakub, B.T.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2003

Language:

english

File:

PDF, 1.11 MB

english, 2003

32

A new regime for operating capacitive micromachined ultrasonic transducers

Bayram, B., Haeggstrom, E., Yaralioglu, G.G., Khuri-Yakub, B.T.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2003

Language:

english

File:

PDF, 834 KB

english, 2003

33

[IEEE 2001 IEEE Ultrasonics Symposium. Proceedings. An International Symposium - Atlanta, GA, USA (7-10 Oct. 2001)] 2001 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.01CH37263) - Capacitive micromachined ultrasonic transducer arrays for medical imaging: experimental results

Denmirci, U., Oralkan, O., Johnson, J.A., Ergun, A.S., Karaman, M., Khuri-Yakub, B.T.

Year:

2001

Language:

english

File:

PDF, 129 KB

english, 2001

34

A novel parametric-effect MEMS amplifier

Raskin, J.-P., Brown, A.R., Khuri-Yakub, B., Rebeiz, G.M.

Journal:

Journal of Microelectromechanical Systems

Year:

2000

Language:

english

File:

PDF, 238 KB

english, 2000

35

GPU-Based Real-Time Volumetric Ultrasound Image Reconstruction for a Ring Array

Jung Woo Choe,, Nikoozadeh, A., Oralkan, O., Khuri-Yakub, B. T.

Journal:

IEEE Transactions on Medical Imaging

Year:

2013

Language:

english

File:

PDF, 1.30 MB

english, 2013

36

Capacitive micromachined ultrasonic transducers with piston-shaped membranes: fabrication and experimental characterization

Yongli Huang,, Xuefeng Zhuang,, Hggstrom, E., Ergun, A., Ching-Hsiang Cheng,, Khuri-Yakub, B.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2009

Language:

english

File:

PDF, 1.35 MB

english, 2009

37

New Technologies in Clinical Ultrasound

Kamaya, Aya, Machtaler, Steven, Safari Sanjani, Sahinaz, Nikoozadeh, Amin, Graham Sommer, Frank, (Pierre) Khuri-Yakub, Butrus T., Willmann, Jürgen K., Desser, Terry S.

Journal:

Seminars in Roentgenology

Year:

2013

Language:

english

File:

PDF, 2.73 MB

english, 2013

38

Capacitive micromachined ultrasonic transducers: fabrication technology

Erguri, A.S., Yongli Huang,, Xuefeng Zhuang,, Oralkan, O., Yarahoglu, G.G., Khuri-Yakub, B.T.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2005

Language:

english

File:

PDF, 1018 KB

english, 2005

39

Integrated Circuits for Volumetric Ultrasound Imaging With 2-D CMUT Arrays

Bhuyan, Anshuman, Jung Woo Choe,, Byung Chul Lee,, Wygant, Ira O., Nikoozadeh, Amin, Oralkan, Omer, Khuri-Yakub, Butrus T.

Journal:

IEEE Transactions on Biomedical Circuits and Systems

Year:

2013

Language:

english

File:

PDF, 1.77 MB

english, 2013

40

Packaging and modular assembly of large-area and fine-pitch 2-D ultrasonic transducer arrays

Der-Song Lin,, Wodnicki, R., Xuefeng Zhuang,, Woychik, C., Thomenius, K. E., Fisher, R. A., Mills, D. M., Byun, A. J., Burdick, W., Khuri-Yakub, P., Bonitz, B., Davies, T., Thomas, G., Otto, B., Top

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2013

Language:

english

File:

PDF, 2.16 MB

english, 2013

41

Three-dimensional photoacoustic imaging using a two-dimensional CMUT array

Vaithilingam, S., Ma, T-J., Furukawa, Y., Wygant, I.O., Zhuang, X., De La Zerda, A., Oralkan, Omer, Kamaya, Aya, Gambhir, Sanjiv, Jeffrey, R., Khuri-yakub, Butrus

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2009

Language:

english

File:

PDF, 632 KB

english, 2009

42

Wafer-bonded 2-D CMUT arrays incorporating through-wafer trench-isolated interconnects with a supporting frame

Xuefeng Zhuang, I. Wygant, Der-song Lin, M. Kupnik, O. Oralkan, B. Khuri-yakub

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2009

Language:

english

File:

PDF, 1.11 MB

english, 2009

43

Finite element modeling and experimental characterization of crosstalk in 1-D CMUT arrays

B. Bayram, M. Kupnik, G. Yaralioglu, O. Oralkan, A. Ergun, D. Lin, S. Wong, B. Khuri-yakub

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2007

Language:

english

File:

PDF, 11.56 MB

english, 2007

44

A comparison between conventional and collapse-mode capacitive micromachined ultrasonic transducers in 10-MHz 1-D arrays

Kwan Kyu Park,, Oralkan, O., Khuri-Yakub, B. T.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2013

Language:

english

File:

PDF, 1.19 MB

english, 2013

45

Dynamic analysis of capacitive micromachined ultrasonic transducers

Bayram, B., Yaralioglu, G.G., Kupnik, M., Ergun, A.S., Oralkan, O., Nikoozadeh, A., Khuri-Yakub, B.T.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2005

Language:

english

File:

PDF, 687 KB

english, 2005

46

Forward-looking intracardiac ultrasound imaging using a 1-D CMUT array integrated with custom front-end electronics

Nikoozadeh, A., Wygant, I.O., Der-Song Lin,, Oralkan, O., Ergun, A.S., Stephens, D.N., Thomenius, K.E., Dentinger, A.M., Wildes, D., Akopyan, G., Shivkumar, K., Mahajan, A., Sahn, D.J., Khuri-Yakub,

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2008

Language:

english

File:

PDF, 1.76 MB

english, 2008

47

[IEEE 2010 IEEE Ultrasonics Symposium (IUS) - San Diego, CA, USA (2010.10.11-2010.10.14)] 2010 IEEE International Ultrasonics Symposium - Modeling and measuring the effects of mutual impedance on multi-cell CMUT configurations

Park, K. K., Kupnik, M., Lee, H. J., Khuri-Yakub, B. T., Wygant, I. O.

Year:

2010

Language:

english

File:

PDF, 1.40 MB

english, 2010

48

Experimental characterization of collapse-mode CMUT operation

Oralkan, O., Bayram, B., Yaralioglu, G.G., Ergun, A.S., Kupnik, M., Yeh, D.T., Wygant, I.O., Khuri-Yakub, B.T.

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2006

Language:

english

File:

PDF, 737 KB

english, 2006

49

[IEEE 1998 IEEE Ultrasonics Symposium. Proceedings - Sendai, Japan (5-8 Oct. 1998)] 1998 IEEE Ultrasonics Symposium. Proceedings (Cat. No. 98CH36102) - Micromachined capacitive transducer arrays for medical ultrasound imaging

Jin, X.C., Degertekin, F.L., Calmes, S., Zhang, X.J., Ladabaum, I., Khuri-Yakub, B.T.

Year:

1998

Language:

english

File:

PDF, 309 KB

english, 1998

50

Fabrication of Flexible Transducer Arrays With Through-Wafer Electrical Interconnects Based on Trench Refilling With PDMS

Xuefeng Zhuang,, Der-Song Lin,, Oralkan, O., Khuri-Yakub, B.T.

Journal:

Journal of Microelectromechanical Systems

Year:

2008

Language:

english

File:

PDF, 854 KB

english, 2008